1.1 This test method covers the size distribution analysis of particulate contamination, 5 µm or greater in size, either on, or washed from, the surface of small electron-device components. A maximum variation of two to one (633 % of the average of two runs) should be expected for replicate counts on the same sample.
1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
ASTM F24-09(2015) history
2020ASTM F24-20 Standard Test Method for Measuring and Counting Particulate Contamination on Surfaces
2015ASTM F24-09(2015) Standard Test Method for Measuring and Counting Particulate Contamination on Surfaces
2009ASTM F24-09 Standard Method for Measuring and Counting Particulate Contamination on Surfaces
2004ASTM F24-04 Standard Method for Measuring and Counting Particulate Contamination on Surfaces
2000ASTM F24-00 Standard Method for Measuring and Counting Particulate Contamination on Surfaces