T/QGCML 743-2023
Specifications for anodizing process of semiconductor equipment parts (English Version)

Standard No.

T/QGCML 743-2023

Language

Chinese, Available in English version

Release Date

2023

Published By

Group Standards of the People's Republic of China

Latest

T/QGCML 743-2023

Scope

This standard specifies the terms and definitions, technical requirements, and anodizing process specifications for anodizing process specifications for semiconductor equipment parts. This standard applies to the anodizing process of semiconductor equipment parts.

T/QGCML 743-2023 history

• 2023 T/QGCML 743-2023 Specifications for anodizing process of semiconductor equipment parts