This document specifies the terms and definitions, models and nomenclature, basic requirements, technical requirements, test methods, inspection rules, marking, packaging, transportation and storage of GW-level heterojunction cell plate PECVD equipment. This document is applicable to GW-level heterojunction cell plate PECVD equipment.
T/CIET 325-2023 history
2023T/CIET 325-2023 Specifications for GW-level heterojunction cell plate PECVD equipment