GB/T 40577-2021
Terminology for integrated circuit（IC）manufacturing equipment (English Version)
- Standard No.
- GB/T 40577-2021
- Language
- Chinese, Available in English version
- Release Date
- 2021
- Published By
- 国家市场监督管理总局、中国国家标准化管理委员会
- Latest
- GB/T 40577-2021
- Scope
- This document specifies the basic and commonly used terms of integrated circuit (IC) manufacturing equipment, including basic terms, crystal growth processing equipment, mask manufacturing equipment, lithography and etching equipment, doping equipment, thin film deposition equipment, cleaning equipment, Terms for packaging equipment, testing equipment, and common parts. This document is applicable to the design, development, production and application of integrated circuit manufacturing equipment, as well as to the research, teaching and publication of integrated circuit manufacturing equipment.
GB/T 40577-2021 history
- 2021 GB/T 40577-2021 Terminology for integrated circuit（IC）manufacturing equipment
