This document is applicable to the production of 1,3,5-trimethyl-1,3,5-tris(3,3,3-trifluoropropyl)cyclotrisiloxane through catalytic condensation, separation and other processes. The obtained low viscosity hydroxyl-terminated methyl trifluoropropyl polysiloxane is also called low viscosity hydroxyl fluorosilicone oil. This document specifies the requirements, test methods, inspection rules and marking, packaging, transportation and storage of low viscosity hydroxyfluorosilicone oil.