DB53/T 500-2013
Determination of trichlorosilane component content for polysilicon by gas chromatography (English Version)

Standard No.

DB53/T 500-2013

Language

Chinese, Available in English version

Release Date

2013

Published By

Yunnan Provincial Standard of the People's Republic of China

Latest

DB53/T 500-2013

Scope

This standard specifies a method for determining the content of SiHCl3, SiH2Cl2, SiCl4 and HCl components in trichlorosilane for polycrystalline silicon by gas chromatography. This standard is applicable to the determination of SiHCl3, SiH2Cl2, SiCl4 and HCl content in trichlorosilane used for the production of polycrystalline silicon using the modified Siemens method. Measuring range: SiH2Cl2＞0.01%, SiCl4＞0.01%, HCl＞0.01%.

DB53/T 500-2013 history

• 2013 DB53/T 500-2013 Determination of trichlorosilane component content for polysilicon by gas chromatography