BS ISO 20146:2019
Vacuum technology. Vacuum gauges. Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges

Standard No.

BS ISO 20146:2019

Release Date

2019

Published By

British Standards Institution (BSI)

Latest

BS ISO 20146:2019

Scope

What is this standard about? This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges. This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as reference standards.

BS ISO 20146:2019 history

• 2019 BS ISO 20146:2019 Vacuum technology. Vacuum gauges. Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges