BS ISO 11952:2019
Surface chemical analysis. Scanning-probe microscopy. Determination of geometric quantities using SPM: Calibration of measuring systems
- Standard No.
- BS ISO 11952:2019
- Release Date
- 2019
- Published By
- British Standards Institution (BSI)
- Latest
- BS ISO 11952:2019
- Scope
- What is ISO 11952 - Scanning-probe microscopy about? ISO 11952 is applicable for s canning-probe microscopy. ISO 11952 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes (SPMs) for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations. Note- It is not intended for general industrial use, where a lower level of calibration might be required. Who is
BS ISO 11952:2019 history
- 2019 BS ISO 11952:2019 Surface chemical analysis. Scanning-probe microscopy. Determination of geometric quantities using SPM: Calibration of measuring systems
