T/CNIA 0016-2019
Determination of Hydrogen Chloride, Nitrogen, Oxygen and Total Carbon Content in Recycled Hydrogen for Polysilicon by Gas Chromatography (English Version)

Standard No.

T/CNIA 0016-2019

Language

Chinese, Available in English version

Release Date

2019

Published By

Group Standards of the People's Republic of China

Latest

T/CNIA 0016-2019

Scope

This standard specifies the gas chromatography method for determination of hydrogen chloride, nitrogen, oxygen, and total carbon content in recovered hydrogen for polycrystalline silicon. This standard is applicable to the determination of hydrogen chloride, nitrogen, oxygen, and total carbon content of recovered hydrogen for polysilicon. The measurement range is (0-10000) × 10-6.

T/CNIA 0016-2019 history

• 2019 T/CNIA 0016-2019 Determination of Hydrogen Chloride, Nitrogen, Oxygen and Total Carbon Content in Recycled Hydrogen for Polysilicon by Gas Chromatography