T/CCGA 30001-2019
Ultra pure ammonia (English Version)
- Standard No.
- T/CCGA 30001-2019
- Language
- Chinese, Available in English version
- Release Date
- 2019
- Published By
- Group Standards of the People's Republic of China
- Latest
- T/CCGA 30001-2019
- Scope
- This standard specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation, storage, etc. of ultrapure ammonia products. This standard applies to ultrapure ammonia products produced by industrial liquid ammonia through adsorption pre-purification, distillation purification, and terminal purification. This product is the main raw material for microelectronic silicon nitride masking films and an important raw material for the semiconductor, optoelectronics, and light-emitting diode (LED) industries.
T/CCGA 30001-2019 history
- 2019 T/CCGA 30001-2019 Ultra pure ammonia
