T/CASME 798-2023
Specialized processing tools for semiconductor materials (English Version)

Standard No.

T/CASME 798-2023

Language

Chinese, Available in English version

Release Date

2023

Published By

Group Standards of the People's Republic of China

Latest

T/CASME 798-2023

Scope

This document specifies the terms and definitions, classification, basic requirements, process flow, technical requirements, test methods, inspection rules, marking, packaging, transportation and storage and quality commitment content of special processing tools for semiconductor materials.

T/CASME 798-2023 history

• 2023 T/CASME 798-2023 Specialized processing tools for semiconductor materials