This standard specifies the classification, requirements, test methods, inspection rules, marking, packaging, transportation, storage, quality certificate, order (or contract) content and safety of high-purity nitric acid used in the electronics industry. This standard applies to high-purity nitric acid used in the electronics industry (hereinafter referred to as high-purity nitric acid). This product is mainly used in cleaning and etching of silicon wafers and chips for electronic grade polysilicon, liquid crystal display devices, integrated circuits and very large scale integrated circuits.
T/CNIA 0063-2020 history
2020T/CNIA 0063-2020 High-purity nitric acid for electronics industry