GB/T 37211.3-2022 Method for chemical analysis of metal germanium—Part 3: Determination of trace impurity elements content—Glow discharge mass spectrometry (English Version)
General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
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GB/T 37211.3-2022
Scope
This document specifies the method for the determination of trace impurity elements in metallic germanium by glow discharge mass spectrometry. This document is applicable to the determination of trace impurity elements in germanium metal, and the determination range is 0.001 mg/kg~2 mg/kg.
GB/T 37211.3-2022 Referenced Document
GB/T 14264 Semiconductor materials-Terms and definitions
GB/T 37211.3-2022 history
2022GB/T 37211.3-2022 Method for chemical analysis of metal germanium—Part 3: Determination of trace impurity elements content—Glow discharge mass spectrometry