ISO 23131:2021
Ellipsometry — Principles
- Standard No.
- ISO 23131:2021
- Release Date
- 2021
- Published By
- International Organization for Standardization (ISO)
- Latest
- ISO 23131:2021
- Scope
- This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories. It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.
ISO 23131:2021 history
- 2021 ISO 23131:2021 Ellipsometry — Principles
