T/CNIA 0114-2021
Hexachlorodisilane, a by-product of modified Siemens process polysilicon (English Version)

Standard No.

T/CNIA 0114-2021

Language

Chinese, Available in English version

Release Date

2021

Published By

Group Standards of the People's Republic of China

Latest

T/CNIA 0114-2021

Scope

This document stipulates the technical requirements, test methods, inspection rules, marking, packaging, transportation, storage, accompanying documents and order form content of the modified Siemens process polycrystalline silicon by-product hexachlorodisilane. This document applies to hexachlorodisilane, a by-product produced during the production of modified Siemens polysilicon.

T/CNIA 0114-2021 history

• 2021 T/CNIA 0114-2021 Hexachlorodisilane, a by-product of modified Siemens process polysilicon