T/CASME 929-2023
Technical requirements for precision structural components of semiconductor equipment (English Version)

Standard No.

T/CASME 929-2023

Language

Chinese, Available in English version

Release Date

2023

Published By

Group Standards of the People's Republic of China

Latest

T/CASME 929-2023

Scope

This document specifies the basic requirements, raw material requirements, technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage of precision structural components of semiconductor equipment.

T/CASME 929-2023 history

• 2023 T/CASME 929-2023 Technical requirements for precision structural components of semiconductor equipment