UNE-EN 62047-6:2010
Semiconductor devices - Micro-electromechanical devices -- Part 6: Axial fatigue testing methods of thin film materials (Endorsed by AENOR in June of 2010.)

Standard No.

UNE-EN 62047-6:2010

Release Date

2010

Published By

ES-UNE

Latest

UNE-EN 62047-6:2010

UNE-EN 62047-6:2010 history

• 2010 UNE-EN 62047-6:2010 Semiconductor devices - Micro-electromechanical devices -- Part 6: Axial fatigue testing methods of thin film materials (Endorsed by AENOR in June of 2010.)