T/SZMES 3-2021
Determination of the film stress—Substrate curvature method (English Version)
- Standard No.
- T/SZMES 3-2021
- Language
- Chinese, Available in English version
- Release Date
- 2021
- Published By
- Group Standards of the People's Republic of China
- Latest
- T/SZMES 3-2021
- Scope
- This document specifies the terms and definitions for film stress determination based on the substrate bending method, including: substrate, film, specimen, thickness, coating, physical vapor deposition technology, and radius of curvature. Measurement principle: Measure the curvature radius of the substrate before and after single-sided coating, the initial curvature radius of the substrate and the curvature radius of the substrate (coated surface), and calculate the film stress using the Stoney formula.
T/SZMES 3-2021 history
- 2021 T/SZMES 3-2021 Determination of the film stress—Substrate curvature method
