T/QGCML 744-2023
Chemical cleaning process specification for semiconductor equipment parts (English Version)

Standard No.

T/QGCML 744-2023

Language

Chinese, Available in English version

Release Date

2023

Published By

Group Standards of the People's Republic of China

Latest

T/QGCML 744-2023

Scope

This standard specifies the term definitions, technical requirements and chemical cleaning process specifications for chemical cleaning process specifications for semiconductor equipment parts. This standard applies to the chemical cleaning process of semiconductor equipment parts.

T/QGCML 744-2023 history

• 2023 T/QGCML 744-2023 Chemical cleaning process specification for semiconductor equipment parts