JIS H 0611:1994
Methods of measurement of thickness, thickness variation and bow for silicon wafer

Standard No.

JIS H 0611:1994

Release Date

1994

Published By

Japanese Industrial Standards Committee (JISC)

Latest

JIS H 0611:1994

Scope

This standard specifies methods for measuring the thickness, thickness unevenness, and pau of silicon single crystal wafers (hereinafter referred to as wafers).

JIS H 0611:1994 history

• 1994 JIS H 0611:1994 Methods of measurement of thickness, thickness variation and bow for silicon wafer