DIN EN 62047-11:2014-04
Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems (IEC 62047-11:2013); German version EN 62047-11:2013
- Standard No.
- DIN EN 62047-11:2014-04
- Release Date
- 2014
- Published By
- German Institute for Standardization
- Latest
- DIN EN 62047-11:2014-04
DIN EN 62047-11:2014-04 history
- 2014 DIN EN 62047-11:2014-04 Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems (IEC 62047-11:2013); German version EN 62047-11:2013
- 2014 DIN EN 62047-11:2014 Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems (IEC 62047-11:2013); German version EN 62047-11:2013
- 0000 DIN IEC 62047-11:2010
