This standard specifies the property requirements, technical specifications and indicators of hydrogen peroxide products for integrated circuits; determination methods such as content determination, colorimetry determination, acidity determination, total organic carbon determination, anion determination, metal ion determination, particle determination, etc.; also stipulates Inspection rules, marking, packaging, transportation and storage requirements, etc.
T/ICMtia 2-2019 history
2019T/ICMtia 2-2019 Hydrogen peroxide for Intergrated circuits