T/CNIA 0117-2021
Determination of trace anion content in high-purity hydrofluoric acid for electronics industry Ion chromatography (English Version)

Standard No.

T/CNIA 0117-2021

Language

Chinese, Available in English version

Release Date

2021

Published By

Group Standards of the People's Republic of China

Latest

T/CNIA 0117-2021

Scope

This document specifies a method for the determination of trace anions (chloride, nitrate, phosphate, sulfate) in high-purity hydrofluoric acid used in the electronics industry by ion chromatography. This document is suitable for the determination of trace anion content in high-purity hydrofluoric acid used in the electronics industry. Measuring range: 10.000μg/kg～5000.000μg/kg.

T/CNIA 0117-2021 history

• 2021 T/CNIA 0117-2021 Determination of trace anion content in high-purity hydrofluoric acid for electronics industry Ion chromatography