T/ICMTIA SM0028-2022
Electronic grade polysilicon for integrated circuits (English Version)

Standard No.
T/ICMTIA SM0028-2022
Language
Chinese, Available in English version
Release Date
2022
Published By
Group Standards of the People's Republic of China
Latest
T/ICMTIA SM0028-2022
Scope
This document stipulates the grades and categories, technical requirements, test methods, inspection rules, marking, packaging, transportation, storage, accompanying documents and order form contents of electronic grade polysilicon for integrated circuits. This document applies to electronic grade polysilicon for integrated circuits (hereinafter referred to as "polysilicon") made from chlorosilanes and silane.

T/ICMTIA SM0028-2022 history




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