GB/T 38447-2020
Micro-electromechanical system technology—Fatigue testing method of MEMS structure using resonant vibration (English Version)

Standard No.

GB/T 38447-2020

Language

Chinese, Available in English version

Release Date

2020

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Latest

GB/T 38447-2020

Scope

This standard specifies the test method for resonance fatigue test of MEMS structures, including equipment, test environment, sample requirements, test conditions and test procedures. This standard applies to resonance fatigue tests of MEMS structures.

GB/T 38447-2020 Referenced Document

• GB/T 10623 Metallic material.Mechanical testing.Vocabulary
• GB/T 2298 Mechanical vibration,shock and condition monitoring.Vocabulary
• GB/T 26111 Micro-Electro-Mechanical Systems (MEMS) Technical Terminology*， 2023-05-23 Update

GB/T 38447-2020 history

• 2020 GB/T 38447-2020 Micro-electromechanical system technology—Fatigue testing method of MEMS structure using resonant vibration