T/SSEA 0327-2023
Ultra-high purity stainless steel rods for semiconductor manufacturing equipment (English Version)

Standard No.
T/SSEA 0327-2023
Language
Chinese, Available in English version
Release Date
2023
Published By
Group Standards of the People's Republic of China
Latest
T/SSEA 0327-2023
Scope
This document specifies the classification, ordering content, size, shape, weight, technical requirements, and test methods of ultra-high purity stainless steel rods (general term for round steel, square steel, flat steel, and hexagonal steel, hereinafter referred to as steel rods) for semiconductor manufacturing equipment. , inspection rules, packaging, logos and quality certificates. This document applies to ultra-high purity stainless steel hot-rolled steel bars, cold-drawn blanks and cold-drawn steel bars with dimensions (diameter, side length, thickness or distance between opposite sides, hereinafter referred to as size) not greater than 150mm for semiconductor manufacturing equipment valves and steel pipes.

T/SSEA 0327-2023 history

  • 2023 T/SSEA 0327-2023 Ultra-high purity stainless steel rods for semiconductor manufacturing equipment



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