This document specifies the terms and definitions, structure and use environment, basic requirements, technical requirements, test methods, inspection rules, marking, packaging, transportation and storage and quality commitment of copper indium gallium selenide solar cell thin film sputtering deposition equipment. This document applies to thin film sputtering deposition equipment for copper indium gallium selenide solar cells (hereinafter referred to as "equipment").
T/ZZB 1790-2020 history
2020T/ZZB 1790-2020 Sputter equipment for Cu-In-Ga-Se thin film solar cells