ASTM F614-80(1991)e1
Test Method for Distortion of Optical Lenses Used in Photomask Fabrication

Standard No.

ASTM F614-80(1991)e1

Release Date

1991

Published By

American Society for Testing and Materials (ASTM)

Latest

ASTM F614-80(1991)e1

ASTM F614-80(1991)e1 history

• 1991 ASTM F614-80(1991)e1 Test Method for Distortion of Optical Lenses Used in Photomask Fabrication