T/CASAS 032-2023
Test method for the content of metal elements on the surface of silicon carbide wafer—Inductively coupled plasma mass spectrometry (English Version)

Standard No.

T/CASAS 032-2023

Language

Chinese, Available in English version

Release Date

2023

Published By

Group Standards of the People's Republic of China

Latest

T/CASAS 032-2023

T/CASAS 032-2023 history

• 2023 T/CASAS 032-2023 Test method for the content of metal elements on the surface of silicon carbide wafer—Inductively coupled plasma mass spectrometry