DB35/T 1146-2011
Determination of Impurity Element Content in Silicon Materials by Glow Discharge Mass Spectrometry (English Version)
- Standard No.
- DB35/T 1146-2011
- Language
- Chinese, Available in English version
- Release Date
- 2011
- Published By
- Fujian Provincial Standard of the People's Republic of China
- Latest
- DB35/T 1146-2011
- Scope
- This standard specifies the terms and definitions, principles, reagents and materials, instrumentation and equipment, sample requirements, sample requirements, analysis steps, result calculations, and allowable deviations involved in the determination of impurity element content in silicon materials by glow discharge mass spectrometry (GDMS). . This standard is applicable to the determination of impurity elements L i, Be, B, Na, M g, A 1, P, K, Th, U and other elements in silicon materials with a purity not higher than 99.99999%.
DB35/T 1146-2011 history
- 2011 DB35/T 1146-2011 Determination of Impurity Element Content in Silicon Materials by Glow Discharge Mass Spectrometry
