Based on the material performance characteristics of diamond single crystal, and combined with the current research level of dislocation density detection technology of other single crystals such as sapphire at home and abroad, this standard provides the testing principle, measurement accuracy guarantee, and measurement steps for the dislocation density of diamond single crystal polished wafers. etc. have been stipulated.
T/IAWBS 018-2022 history
2022T/IAWBS 018-2022 Test method for dislocation density of diamond single crystal polished wafers