T/DLSHXH 007-2022
Electronic special gas trifluoroiodomethane (English Version)

Standard No.
T/DLSHXH 007-2022
Language
Chinese, Available in English version
Release Date
2022
Published By
Group Standards of the People's Republic of China
Latest
T/DLSHXH 007-2022
Scope
This standard specifies the technical requirements, test methods, inspection rules, marking, packaging, storage and transportation and safety information requirements for trifluoroiodomethane. This standard applies to trifluoroiodomethane products made from industrial grade trifluoroiodomethane as raw material and purified by distillation. This product is mainly used for cleaning semiconductor vapor deposition processing chambers or plasma etching.

T/DLSHXH 007-2022 history




Copyright ©2024 All Rights Reserved