DB32/T 4378-2022
Four-probe method for non-destructive testing of sheet resistance of nanometer and submicron scale thin films on substrate surface (English Version)

Standard No.
DB32/T 4378-2022
Language
Chinese, Available in English version
Release Date
2022
Published By
Jiangsu Provincial Standard of the People's Republic of China
Latest
DB32/T 4378-2022

DB32/T 4378-2022 history

  • 2022 DB32/T 4378-2022 Four-probe method for non-destructive testing of sheet resistance of nanometer and submicron scale thin films on substrate surface
Four-probe method for non-destructive testing of sheet resistance of nanometer and submicron scale thin films on substrate surface



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