NF C96-050-3*NF EN 62047-3:2006
Semiconductor devices - Micro-electromechanical devices - Part 3 : thin film standard test piece for tensile testing

Standard No.

NF C96-050-3*NF EN 62047-3:2006

Release Date

2006

Published By

Association Francaise de Normalisation

Latest

NF C96-050-3*NF EN 62047-3:2006

NF C96-050-3*NF EN 62047-3:2006 history

• 2006 NF C96-050-3*NF EN 62047-3:2006 Semiconductor devices - Micro-electromechanical devices - Part 3 : thin film standard test piece for tensile testing