GB/T 40129-2021 Surface chemical analysis—Secondary ion mass spectrometry—Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer (English Version)
This document describes a method for optimizing the mass calibration accuracy of time-of-flight secondary ion mass spectrometry (SIMS) instruments for general analytical purposes. This document applies only to time-of-flight instruments but is not limited to any specific instrument design. This document provides guidance on the optimization of some of the instrument parameters that can be optimized using this procedure, as well as general peak types suitable for calibrating mass scales to obtain the best mass accuracy.
GB/T 40129-2021 history
2021GB/T 40129-2021 Surface chemical analysis—Secondary ion mass spectrometry—Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer