T/CSTM 01199-2024
Multilayer metal film-Measurement and analysis method of layer structure-X-ray photoelectron spectroscopy (English Version)

Standard No.

T/CSTM 01199-2024

Language

Chinese, Available in English version

Release Date

2024

Published By

Group Standards of the People's Republic of China

Latest

T/CSTM 01199-2024

Scope

This document specifies the analytical method for measuring the layer structure of multi-layer metal thin films using X-ray photoelectron spectroscopy (XPS) depth profiling. This document is suitable for the characterization of the composition, chemical state, and film thickness of nanoscale multilayer metal films within a depth of 70nm~240nm.

T/CSTM 01199-2024 history

• 2024 T/CSTM 01199-2024 Multilayer metal film-Measurement and analysis method of layer structure-X-ray photoelectron spectroscopy