UNE-EN 62047-16:2015
Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films – Wafer curvature and cantilever beam deflection methods (Endorsed by AENOR in August of 2015.)
- Standard No.
- UNE-EN 62047-16:2015
- Release Date
- 2015
- Published By
- ES-UNE
- Latest
- UNE-EN 62047-16:2015
UNE-EN 62047-16:2015 history
- 2015 UNE-EN 62047-16:2015 Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films – Wafer curvature and cantilever beam deflection methods (Endorsed by AENOR in August of 2015.)
