General principles 2 Terminology 3 Design 3.1 General provisions 3.2 Point layout principles 4 Basic requirements for clean production workshops 4.1 General provisions 4.2 Environmental static electricity monitoring and protection, grounding 4.3 Potential environmental damage factors and analysis 4.4 Clean production workshop environmental monitoring indicators 5 Clean production workshop monitoring system composition 5.1 Management and monitoring system 5.2 Data synchronization service system 5.3 Data processing system 5.4 Data collection and remote control system 5.5 Communication system 5.6 System expansion description 6 Instruments, equipment and terminals 6.1 Composition of instruments, equipment and monitoring terminals 6.2 Gateway and monitoring terminal equipment requirements 6.3 Basic requirements for environmental monitoring terminal equipment in clean production workshops 7 Basic requirements for construction and installation 8 System commissioning 9 Completion acceptance 10 Maintenance and maintenance 10.1 Monitoring data backup procedures 10.2 Regular maintenance and calibration system for online monitoring equipment 10.3 Improve maintenance records Appendix A for wording of this regulation Appendix A Cleanliness Classification Reference Table Appendix B Online Monitoring Mathematical Statistics and Analysis Table
T/SZCA 2-2021 history
2021T/SZCA 2-2021 Technical specification for cleanroom environment on-line monitoring