T/CZSBDTHYXH 001-2023
Wafer defects Automatic optical inspection equipment (English Version)

Standard No.

T/CZSBDTHYXH 001-2023

Language

Chinese, Available in English version

Release Date

2023

Published By

Group Standards of the People's Republic of China

Latest

T/CZSBDTHYXH 001-2023

Scope

This standard specifies the terms and definitions, product models, requirements, inspection methods, inspection rules, marking, packaging, transportation, and storage requirements for semiconductor wafer defect optical detectors.

T/CZSBDTHYXH 001-2023 history

• 2023 T/CZSBDTHYXH 001-2023 Wafer defects Automatic optical inspection equipment