T/NXCL 016-2022
200 mm heavily antimony-doped single crystaline Czochralski silicon polished wafer (English Version)
- Standard No.
- T/NXCL 016-2022
- Language
- Chinese, Available in English version
- Release Date
- 2022
- Published By
- Group Standards of the People's Republic of China
- Latest
- T/NXCL 016-2022
T/NXCL 016-2022 history
- 2022 T/NXCL 016-2022 200 mm heavily antimony-doped single crystaline Czochralski silicon polished wafer
