GB/T 42271-2022
Test method for resistivity of semi-insulating monocrystalline silicon carbide by contactless measurement (English Version)

Standard No.

GB/T 42271-2022

Language

Chinese, Available in English version

Release Date

2022

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Latest

GB/T 42271-2022

Scope

This document describes a method for the non-contact measurement of resistivity of semi-insulating silicon carbide single crystals. This document applies to the measurement of semi-insulating silicon carbide single wafers with resistivity ranging from 1×105 Ω·cm to 1×1012 Ω·cm.

GB/T 42271-2022 Referenced Document

• GB/T 14264 Semiconductor materials-Terms and definitions
• GB/T 30656 Silicon carbide single crystal polished wafer*， 2023-03-17 Update

GB/T 42271-2022 history

• 2022 GB/T 42271-2022 Test method for resistivity of semi-insulating monocrystalline silicon carbide by contactless measurement