T/DLSHXH 006-2022
Electronic special gas trimethyl aluminum (English Version)

Standard No.
T/DLSHXH 006-2022
Language
Chinese, Available in English version
Release Date
2022
Published By
Group Standards of the People's Republic of China
Latest
T/DLSHXH 006-2022
Scope
This standard specifies the technical requirements, test methods, inspection rules, packaging, marking, storage, transportation and safety information of trimethylaluminum. This standard applies to finished trimethylaluminum produced by distillation and purification using industrial grade trimethylaluminum as raw material. This product is mainly used in the atomic layer vapor deposition process.

T/DLSHXH 006-2022 history




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