SJ/T 11761-2020
Specification for loading ports of semiconductor equipment for wafers 200mm and below (English Version)

Standard No.

SJ/T 11761-2020

Language

Chinese, Available in English version

Release Date

2020

Published By

工业和信息化部

Latest

SJ/T 11761-2020

SJ/T 11761-2020 history

• 2020 SJ/T 11761-2020 Specification for loading ports of semiconductor equipment for wafers 200mm and below