This standard specifies the basic parameter series of evaporation coating equipment. This standard is applicable to bell-type and box-type evaporative coating equipment with an ultimate pressure within the range of 3×10^(-3)P|(a) ~ 5×10^(-6)P|(a).
SJ/T 11131-1997 history
1997SJ/T 11131-1997 Basic parameter series of evaporation plating equipment