SJ/T 11079-1996
General specifications for mask alignment and exposure systems (English Version)
- Standard No.
- SJ/T 11079-1996
- Language
- Chinese, Available in English version
- Published By
- Professional Standard - Electron
- Latest
- SJ/T 11079-1996
- Replace
- GB 11481-1989
SJ/T 11079-1996 history
- 1970 SJ/T 11079-1996 General specifications for mask alignment and exposure systems
