SJ 2798-1987
Method for determination of particles in electronic grade gases--Light scattering method (English Version)

Standard No.

SJ 2798-1987

Language

Chinese, Available in English version

Release Date

1987

Published By

Professional Standard - Electron

Status

Withdraw 2010-02

Latest

SJ 2798-1987

Scope

This method is suitable for the determination of particles in electronic-grade hydrogen, nitrogen, oxygen, argon and nitrogen. It is also suitable for the determination of particles in ordinary hydrogen, nitrogen, oxygen, argon, helium and other non-corrosive gases.

SJ 2798-1987 history

• 1987 SJ 2798-1987 Method for determination of particles in electronic grade gases--Light scattering method