SJ 2065-1982
Testing method for diffusion furnace for semiconductor device manufacturing (English Version)

Standard No.

SJ 2065-1982

Language

Chinese, Available in English version

Release Date

1982

Published By

Professional Standard - Electron

Latest

SJ 2065-1982

SJ 2065-1982 history

• 1982 SJ 2065-1982 Testing method for diffusion furnace for semiconductor device manufacturing