SJ 2758-1987
Method of measurement by infrared interference for thickness of homoepitaxial layers (English Version)

Standard No.

SJ 2758-1987

Language

Chinese, Available in English version

Release Date

1987

Published By

Professional Standard - Electron

Status

Withdraw 2010-02

Latest

SJ 2758-1987

Scope

This standard is applicable to the measurement of the thickness of epitaxial layers of the same type as the substrate. The room temperature resistivity of the substrate and epitaxial layer should be less than 0.02Ω·cm and greater than 0.1Ω·cm respectively, and the measurable thickness is greater than 2μm.

SJ 2758-1987 history

• 1987 SJ 2758-1987 Method of measurement by infrared interference for thickness of homoepitaxial layers