SJ 2795-1987
Electronic grade Nitrogen (English Version)
- Standard No.
- SJ 2795-1987
- Language
- Chinese, Available in English version
- Release Date
- 1987
- Published By
- Professional Standard - Electron
- Status
- 2010-02
- Latest
- SJ 2795-1987
- Scope
- This standard applies to electronic grade nitrogen used in the production process of semiconductor materials, discrete devices and integrated circuits. According to its use requirements, electronic grade nitrogen is divided into three levels, codenamed: Electronic grade III nitrogen coded: DZN|(2 )-Ⅲ; The code for electronic grade II nitrogen is: DZN|(2)-Ⅱ; the code for electronic grade I nitrogen is: DZN|(2)-I.
SJ 2795-1987 history
- 1987 SJ 2795-1987 Electronic grade Nitrogen
