SJ/T 31064-1994
Requirements of readiness and methods of inspection and assessment for Type 3800 buffing machines (English Version)

Standard No.

SJ/T 31064-1994

Language

Chinese, Available in English version

Published By

Professional Standard - Electron

Status

Withdraw 2010-02

Latest

SJ/T 31064-1994

Scope

This standard specifies the integrity requirements and inspection and evaluation methods of the 3800 polishing machine. This standard applies to wafer processing and polishing machines used in semiconductor device production.

SJ/T 31064-1994 history

• 1970 SJ/T 31064-1994 Requirements of readiness and methods of inspection and assessment for Type 3800 buffing machines